Pauly, Steffen, University of Stuttgart, Institute of Interfacial Process Engineering and Plasma Technology IGVP, Alemania
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- EM Modelling and Numerical Techniques
Modelling and Study of a Microwave Plasma Source for High-rate Etching
Resumen
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Reconocimiento-NoComercial-SinObraDerivada 4.0 Internacional .
ISSN 2603-5855